화학공학소재연구정보센터
Journal of Crystal Growth, Vol.277, No.1-4, 26-31, 2005
Growth and characterization of a-axis textured ZnO thin films
Smooth a-axis oriented ZnO thin films are grown on (001) MgO substrates by pulsed laser deposition assisted by a very directional radio frequency oxygen plasma. The structure of the film is examined by X-ray diffraction, electron diffraction and high resolution electron microscopy. The film grows with vertical columns and is highly textured. Two preferential orientation relations between the ZnO film and the MgO substrate are observed: (10010)(ZnO) vertical bar vertical bar (002)(MgO); [0002](ZnO)vertical bar vertical bar[2 0 0](MgO) and (1010)(ZnO) vertical bar (002)(ZnO) vertical bar vertical bar [200](MgO) [1210](MgO). The film/substrate interface is flat and strained because of the rather large lattice mismatch between the (1010) plane of ZnO and the (002) plane of MgO. (c) 2005 Elsevier B.V. All rights reserved.