Solid-State Electronics, Vol.45, No.11, 1931-1937, 2001
Recent critical issues in Si/Si1-xGex/Si heterostructure FET devices
In this paper we present a summary of the most important critical issues in Si/Si1-xGex p-type and n-type heterostructure field-effect transistors. The controversial issue of alloy scattering and the phenomenon of velocity overshoot are reviewed and discussed. Achievements and problems associated with channel engineering and the use of alternative gate electrodes and high-kappa dielectric materials are also addressed.
Keywords:strained SiGe;strained-Si;alloy scattering;velocity overshoot;poly-SiGe gate;high-k dielectric