In this study the synthesis of functionalized self-assembled monolayers (SAMs) with SH. SO3H, NH2 and CN functionality onto silica particles and their properties has been studied and characterized by infrared spectroscopy, time-of-flight secondary ion mass spectrometry (ToF-SIMS) and measurement of the sigma potential of the resulting powder. The infrared and ToF-SIMS measurements of the samples clearly show the presence of CH2 goups and the various functionalized head groups of the SAMs, indicating a successful deposition of the SAMs onto the silica particles. The measurements of the zeta potential of the samples show clear variations of their zeta potential depending on the type of SAM compared to the zeta potential of the pure silica powder used in this study. Even positive zeta potential could be measured for silica powder coated with NH2 and CN SAM.