화학공학소재연구정보센터
Thin Solid Films, Vol.516, No.5, 541-544, 2008
ULVAC research and development of Cat-CVD applications
This paper reports the feasibility for industrial implementation of Cat-CVD (Hot-Wire CVD) technology. Some application examples are shown, and their features and problems are described. Cat-CVD is a unique technology which has a lot of possibilities. Some of them will be commercialized in the near future, but the others need a breakthrough for mass production. (C) 2007 Elsevier B.V. All rights reserved.