Efforts of industrial application of Cat-CVD technology are surveyed. Recent movement of industrial implementation is also reviewed by showing examples in Japanese industry. Cat-CVD technology is originally developed as a new tool for fabricating semiconductor devices, however, recently, use of the technology is attempted in various fields such as chemical, mechanical and bio-technical engineering. It is shown that Cat-CVD has high feasibility as a fundamental technology of modem industries. (C) 2007 Elsevier B.V. All rights reserved.