Solid-State Electronics, Vol.52, No.11, 1833-1836, 2008
Bismuth doped ZnSe films fabricated on silicon substrates by pulsed laser deposition
The preparation of bismuth doped ZnSe films on silicon (100) by pulsed laser deposition (PLD) is reported. Bismuth was used as a p-type dopant source material for ZnSe. The stable p-type films with hole carrier concentration of about 10(16)-10(18) cm(-3) were obtained. By scanning electron microscopy (SEM) and X-ray diffraction (XRD), it was found that the ambient pressure during film deposition has much to do with the morphology and crystallinity of the as-deposited products. The presence of Bi in the Bi-doped ZnSe films was confirmed by the X-ray photoelectron spectroscopy (XPS) and the possibility of a Bi-Zn-2V(Zn) complex forming a shallow acceptor level was discussed. (C) 2008 Elsevier Ltd. All rights reserved.