Inorganic Chemistry, Vol.35, No.21, 5968-5969, 1996
Synthesis, Structure, and Characterization of the Hydrogen-Substituted Imido Complex TiCl(NH)(Opph(3))(2)
The first hydrogen-substituted imido complex of the group 4 metals has been synthesized. Its crystal structure shows the titanium atom in square pyramidal geometry with a very short titanium-nitrogen bond length. This complex represents a structural model for species that have been frequently proposed as intermediates in chemical vapor deposition processes.
Keywords:CHEMICAL-VAPOR-DEPOSITION;NITRIDE THIN-FILMS;TITANIUM NITRIDE;AMMONIA;TETRACHLORIDE;GROWTH;PHASE;ZIRCONIUM;TANTALUM;CRYSTAL