Electrochemical quartz crystal microbalance (EQCM) and rotating disk electrode (RDE) techniques were utilized to systematically investigate the electrodeposition of SbxTe1-x (0.1 < x < 0.8). In addition, the effect of applied potential and agitation were correlated to the film composition, crystal structure, and morphology. Although the film composition was independent of the agitation rate, the deposition rate, current efficiency, crystallinity and phase of SbxTe1-x were all strongly influenced by it. The deposition rate monotonically increased with increases in the rotation rate because of the faster diffusion rate of HTeO2+ ions to the cathode. Amorphous thin films were electrodeposited in the absence of agitation, whereas polycrystalline Sb2Te3 with elemental Sb and Te were co-deposited at a higher agitation independent of the applied deposition potential. (C) 2011 Elsevier Ltd. All rights reserved.