Fabrication of Silica Mesh Patterns via Self-Assembly of Block Copolymers

Dong Hyun Lee

Macromolecular Research, Vol.20, No.9, 990-995, September, 2012

DOI10.1007/s13233-012-0143-x Export Citation

Fabrication of Silica Mesh Patterns via Self-Assembly of Block Copolymers

Dong Hyun Lee^†

Department of Polymer Science and Engineering, Dankook University, Gyeonggi, 448-701, Korea

E-mail:

In this study, we developed a simple way to fabricate well-ordered nanoporous structures in square arrays, or mesh patterns. Inorganic silica mesh patterns in nanometer scale were generated by using self-assembly of block copolymers (BCPs). Polystyrene-block-poly(2-vinylpyridine) copolymers (S2VP) were deposited on a silicon wafer by the spin-coating method. Well-ordered cylindrical microdomains with parallel orientation to the surface were obtained after solvent-annealing in tetrahydrofuran (THF) vapor. Immersion of thin films into ethanol induced the reconstruction of their surface and caused trenches, which were porous structures. Polydimethylsiloxane (PDMS) was coated on the film and then exposed to UV-ozone to generate silica stripes from PDMS. As the previous steps were repeated, it was found by scanning probe microscopy (SPM) measurements that cylindrical microdomains were preferentially directed orthogonal to the ridge of Si stripes due to the wetting behavior of (BCPs). Finally, silica mesh patterns were fabricated from this distinct orientation of cylindrical microdomains on underlying Si stripes.

Keywords:mesh patterns;block copolymers;self-assembly;solvent-annealing;and silica stripes.

[References]

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Tang C, Lennon EM, Fredrickson GH, Kramer EJ, Hawker KJ, Science., 322, 429 (2008)
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Xu T, Kim HC, DeRouchey J, Seney C, Levesque C, Martin P, Stafford CM, Russell TP, Polymer, 42(21), 9091 (2001)
Lee DH, Park S, Gu W, Russell TP, ACS Nano., 5, 1207 (2011)
Jung YS, Ross CA, Nano Lett., 7, 2046 (2007)
Jeong S, Moon H, Shin J, Kim BH, Shin DO, Kim JY, Lee Y, Kim JU, Kim SO, Nano Lett., 10, 3500 (2010)
Hong SW, Gu X, Huh J, Xiao S, Russell TP, ACS Nano., 4, 2855 (2011)
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Melde BJ, Burkett SL, Xu T, Goldbach JT, Russell TP, Hawker CJ, Chem. Mater., 17, 4743 (2005)
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[Related Articles]

[1] Galatsis K, Wang KL, Ozkan M, Ozkan CS, Huang Y, Chang JP, Monbouquette HG, Chen Y, Nealey P, Botros Y, Adv. Mater., 22(6), 769 (2010)

[2] Jo PS, Park YJ, Kang SJ, Kim TH, Park C, Kim E, Ryu DY, Kim HC, Macromol. Res., 18(8), 777 (2010)

[3] Lee W, Han H, Lotnyk A, Schubert MA, Senz S, Alexe M, Hesse D, Baik S, Gosele U, Nat. Nanotechnol., 3, 402 (2008)

[4] Cheng JY, Ross CA, Chan VZH, Thomas EL, Lammertink RGH, Vancso GJ, Adv. Mater., 13(15), 1174 (2001)

[5] Maier SA, Brongersma ML, Kik PG, Meltzer S, Requicha AAG, Atwater HA, Adv. Mater., 13(19), 1501 (2001)

[6] Kim DH, Kim SH, Lavery K, Russell TP, Nano Lett., 4, 1841 (2004)

[7] Hawker CJ, Russell TP, MRS Bull., 30, 952 (2005)

[8] Tang C, Lennon EM, Fredrickson GH, Kramer EJ, Hawker KJ, Science., 322, 429 (2008)

[9] Park S, Lee DH, Xu J, Kim B, Hong SW, Jeong U, Xu T, Russell TP, Science., 323, 1030 (2009)

[10] Ross CA, Annu. Rev. Mater. Res., 31, 203 (2001)

[11] Fasolka MJ, Mayes AM, Annu. Rev. Mater. Res., 31, 323 (2001)

[12] Kim SO, Solak HH, Stoykovich MP, Ferrier MJ, de Pablo JJ, Nealey PE, Nature., 424, 411 (2003)

[13] Fan HJ, Werner P, Zacharias M, Small., 2, 700 (2006)

[14] Kim JK, Lee JI, Lee DH, Macromol. Res., 16(4), 267 (2008)

[15] Hamley IW, The Physics of Block Copolymers, Oxford Univ. Press, New York (1998)

[16] Hashimoto T, in Thermoplastic Elastomers, Legge NR, Holden G, Schroeder H, Eds., Hanser, New York (1996)

[17] Leibler L, Macromolecules., 13, 1602 (1980)

[18] Bates FS, Fredrickson GH, Annu. Rev. Phys. Chem., 41, 525 (1990)

[19] Mansky P, Liu Y, Huang E, Russell TP, Hawker C, Science, 275(5305), 1458 (1997)

[20] In I, La YH, Park SM, Nealey PF, Gopalan P, Langmuir, 22(18), 7855 (2006)

[21] Xu T, Kim HC, DeRouchey J, Seney C, Levesque C, Martin P, Stafford CM, Russell TP, Polymer, 42(21), 9091 (2001)

[22] Lee DH, Park S, Gu W, Russell TP, ACS Nano., 5, 1207 (2011)

[23] Jung YS, Ross CA, Nano Lett., 7, 2046 (2007)

[24] Jeong S, Moon H, Shin J, Kim BH, Shin DO, Kim JY, Lee Y, Kim JU, Kim SO, Nano Lett., 10, 3500 (2010)

[25] Hong SW, Gu X, Huh J, Xiao S, Russell TP, ACS Nano., 4, 2855 (2011)

[26] Morkved TL, Lu M, Urbas AM, Ehrichs EE, Jaeger HM, Mansky P, Russell TP, Science., 16, 931 (1996)

[27] Thurn-Albrecht T, DeRouchey J, Russell TP, Jaeger HM, Macromolecules, 33(9), 3250 (2000)

[28] Stoykovich MP, Muller M, Kim SO, Solak HH, Edwards EW, de Pablo JJ, Nealey PF, Science., 308, 1442 (2005)

[29] Segalman RA, Yokoyama H, Kramer EJ, Adv. Mater., 13(15), 1152 (2001)

[30] Segalman RA, Hexemer A, Kramer EJ, Phys. Rev.Lett., 1961011, 91 (2003)

[31] De Rosa C, Park C, Thomas EL, Lotz B, Nature., 405, 433 (2000)

[32] De Rosa C, Park C, Lotz B, Wittmann JC, Fetters LJ, Thomas EL, Macromolecules, 33(13), 4871 (2000)

[33] Skrabalak SE, Suslick KS, J. Am. Chem. Soc., 127(28), 9990 (2005)

[34] Melde BJ, Burkett SL, Xu T, Goldbach JT, Russell TP, Hawker CJ, Chem. Mater., 17, 4743 (2005)

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