Nanodots have been fabricated on rutile TiO2(1 1 0) single crystals using Ar ion beam. Ion beam sputtering creates oxygen vacancies, leading to a 45 nm thick Ti rich layer, on the surface. Post-sputtering, rutile TiO2 also exhibits a decrease in the inter planar separation along [1 1 0] direction. Additionally, blueshift in the E-g Raman mode, representing the vibrations of oxygen atoms along c-axis, is also observed. Both these results suggest the development of a compressive stress along c-axis upon sputtering. Enhancement in intensity of A(1g) Raman mode also indicates modification in Ti-O vibrational influence. (C) 2011 Elsevier B. V. All rights reserved.