검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
ULVAC research and development of Cat-CVD applications Asari S, Fujinaga T, Takagi M, Hashimoto M, Saito K, Harada M, Ishikawa M Thin Solid Films, 516(5), 541, 2008 |
| 2 |
Effect of hydrogen on SiNx films deposited by Cat-CVD method Fujinaga T, Takagi M, Hashimoto M, Asari S, Saito K Thin Solid Films, 516(5), 615, 2008 |
| 3 |
Development of catalytic chemical vapor deposition apparatus for large size substrates Osono S, Kitazoe M, Tsuboi H, Asari S, Saito K Thin Solid Films, 501(1-2), 61, 2006 |
| 4 |
A layer-by-layer Cat-CVD of conformal and stoichiometric silicon nitride with in-situ H-2 post-treatment Kitazoe M, Osono S, Itoh H, Asari S, Saito K, Hayama M Thin Solid Films, 501(1-2), 160, 2006 |