검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Derivation of Rate Constants for the Batch Furnace Radical Oxidation of Silicon Wafers via Hydrogen Combustion Bailey J, Qiu T, Chatham H, Treichel H, Mohamed K Journal of the Electrochemical Society, 156(5), H372, 2009 |
| 2 |
Atomic layer deposition of hafnium oxide and hafnium silicate thin films using liquid precursors and ozone Senzaki Y, Park S, Chatham H, Bartholomew L, Nieveen W Journal of Vacuum Science & Technology A, 22(4), 1175, 2004 |
| 3 |
Equivalent oxide thickness reduction of interpoly dielectric using ALD-Al2O3 for flash device application Lee TP, Jang C, Haselden B, Dong M, Park S, Bartholomew L, Chatham H, Senzaki Y Journal of Vacuum Science & Technology B, 22(5), 2295, 2004 |