검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Fully automated hot embossing processes utilizing high resolution working stamps Glinsner T, Veres T, Kreindl G, Roy E, Morton K, Wieser T, Thanner C, Treiblmayr D, Miller R, Lindner P Journal of Vacuum Science & Technology B, 28(1), 36, 2010 |
| 2 |
High accuracy UV-nanoimprint lithography step-and-repeat master stamp fabrication for wafer level camera application Kreindl G, Glinsner T, Miller R, Treiblmayr D, Fodisch R Journal of Vacuum Science & Technology B, 28(6), C6M57, 2010 |
| 3 |
Fabrication of 3D-photonic crystals via UV-nanoimprint lithography Glinsner T, Lindner P, Muhlberger M, Bergmair I, Schoftner R, Hingerl K, Schmid H, Kley EB Journal of Vacuum Science & Technology B, 25(6), 2337, 2007 |
| 4 |
Impact of residual layer uniformity on UV stabilization after embossing Wissen M, Schulz H, Bogdanski N, Scheer HC, Hirai Y, Kikuta H, Ahrens G, Reuther F, Glinsner T Journal of Vacuum Science & Technology B, 22(6), 3224, 2004 |
| 5 |
High resolution lithography with PDMS molds Bender M, Plachetka U, Ran J, Fuchs A, Vratzov B, Kurz H, Glinsner T, Lindner F Journal of Vacuum Science & Technology B, 22(6), 3229, 2004 |