검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
SCALPEL mark detection using Si/SiO2 and 100 keV backscattered electrons Farrow RC, Mkrtchyan M, Kizilyalli IC, Waskiewicz WK, Hopkins LC, Alakan A, Gibson G, Brown P, Misra S, Trimble L Journal of Vacuum Science & Technology B, 19(5), 1852, 2001 |
| 2 |
Linewidth reduction using liquid ashing for sub-100 nm critical dimensions with 248 nm lithography Timko AG, Frackoviak J, Hopkins LC, Klemens FP, Trimble LE, Nalamasu O, Watson GP, Mansfield WM, Barr D, Li J Journal of Vacuum Science & Technology B, 19(6), 2713, 2001 |
| 3 |
Application of transmission electron detection to SCALPEL mask metrology Farrow RC, Postek MT, Keery WJ, Jones SN, Lowney JR, Blakey M, Fetter LA, Griffith JE, Liddle JA, Hopkins LC, Huggins HA, Peabody M, Novembre A Journal of Vacuum Science & Technology B, 15(6), 2167, 1997 |
| 4 |
Wall angle measurement with a scanning probe microscope employing a one-dimensional force sensor Griffith JE, Hopkins LC, Bryson CE, Berghaus A, Snyder EJ, Plombon JJ, Vasilyev LA, Hecht M, Bindell JB Journal of Vacuum Science & Technology B, 15(6), 2189, 1997 |
| 5 |
Polycrystalline Tungsten and Iridium Probe Tip Preparation with a Ga+ Focused Ion-Beam Hopkins LC, Griffith JE, Harriott LR, Vasile MJ Journal of Vacuum Science & Technology B, 13(2), 335, 1995 |
| 6 |
Dimensional Metrology with Scanning Probe Microscopes Griffith JE, Marchman HM, Miller GL, Hopkins LC Journal of Vacuum Science & Technology B, 13(3), 1100, 1995 |
| 7 |
Edge Position Measurement with a Scanning Probe Microscope Griffith JE, Marchman HM, Hopkins LC Journal of Vacuum Science & Technology B, 12(6), 3567, 1994 |
| 8 |
Line-Profile Measurement with a Scanning Probe Microscope Griffith JE, Marchman HM, Miller GL, Hopkins LC, Vasile MJ, Schwalm SA Journal of Vacuum Science & Technology B, 11(6), 2473, 1993 |