검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Nanolithography performances of ultraviolet III chemically amplified positive resist Grella L, Gentili M, Di Fabrizio E, Baciocchi M, Mastrogiacomo L, Maggiora R, Scopa L Journal of Vacuum Science & Technology B, 15(6), 2596, 1997 |
| 2 |
One-Step Electron-Beam Lithography for Multipurpose, Diffractive Optical-Elements with 200 nm Resolution Difabrizio E, Grella L, Baciocchi M, Gentili M, Peschiaroli D, Mastrogiacomo L, Maggiora R Journal of Vacuum Science & Technology B, 14(6), 3855, 1996 |
| 3 |
Nanometer Metrology by Means of Backscattered Electrons Difabrizio E, Grella L, Gentili M, Baciocchi M, Mastrogiacomo L, Maggiora R Journal of Vacuum Science & Technology B, 13(2), 321, 1995 |
| 4 |
High-Accuracy Thickness Measurements by Means of Backscattering Electron Metrology Baciocchi M, Difabrizio E, Gentili M, Grella L, Maggiora R, Mastrogiacomo L, Peschiaroli D Journal of Vacuum Science & Technology B, 13(6), 2676, 1995 |
| 5 |
Secondary-Electron Line Scans over High-Resolution Resist Images - Theoretical and Experimental Investigation of Induced Local Electrical-Field Effects Grella L, Difabrizio E, Gentili M, Baciocchi M, Mastrogiacomo L, Maggiora R, Capodicci L Journal of Vacuum Science & Technology B, 12(6), 3555, 1994 |
| 6 |
Fabrication of Controlled Slope Attenuated Phase-Shift X-Ray Masks for 250 nm Synchrotron Lithography Gentili M, Difabrizio E, Grella L, Baciocchi M, Mastrogiacomo L, Maggiora R, Xiao J, Cerrina F Journal of Vacuum Science & Technology B, 12(6), 3954, 1994 |
| 7 |
Metrology of High-Resolution Resist Structures on Insulating Substrates Difabrizio E, Grella L, Luciani L, Gentili M, Baciocchi M, Figliomeni M, Mastrogiacomo L, Maggiora R, Leonard Q, Cerrina F, Molino M, Powderly D Journal of Vacuum Science & Technology B, 11(6), 2456, 1993 |
| 8 |
Metrology for Replicated X-Ray Masks Using an Electron-Beam Machine Luciani L, Difabrizio E, Grella L, Baciocchi M, Figliomeni M, Gentili M, Mastrogiacomo L, Maggiora R, Kraspenova A, Reilly M Journal of Vacuum Science & Technology B, 11(6), 2463, 1993 |
| 9 |
Development of an Electron-Beam Process for the Fabrication of X-Ray Nanomasks Gentili M, Grella L, Difabrizio E, Luciani L, Baciocchi M, Figliomeni M, Maggiora R, Mastrogiacomo L, Cerrina F Journal of Vacuum Science & Technology B, 11(6), 2938, 1993 |