검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Advanced generation of rotatable magnetron technology for high performance reactive sputtering Nadel SJ, Greene P, Rietzel J, Perata M, Malaszewski L, Hill R Thin Solid Films, 502(1-2), 15, 2006 |
| 2 |
Equipment, materials and processes: a review of high rate sputtering technology for glass coating Nadel SJ, Greene P, Rietzel J, Strumpfel J Thin Solid Films, 442(1-2), 11, 2003 |
| 3 |
Strategies for high rate reactive sputtering Nadel SJ, Greene P Thin Solid Films, 392(2), 174, 2001 |