검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Formation of polycrystalline BaSi2 films by radio-frequency magnetron sputtering for thin-film solar cell applications Yoneyama T, Okada A, Suzuno M, Shibutami T, Matsumaru K, Saito N, Yoshizawa N, Toko K, Suemasu T Thin Solid Films, 534, 116, 2013 |
| 2 |
Seed layer free conformal ruthenium film deposition on hole substrates by MOCVD using (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium Kawano K, Nagai A, Kosuge H, Shibutami T, Oshima N, Funakubo H Electrochemical and Solid State Letters, 9(7), C107, 2006 |
| 3 |
Ruthenium film with high nuclear density deposited by MOCVD using a novel liquid precursor Shibutami T, Kawano K, Oshima N, Yokoyama S, Funakubo H Electrochemical and Solid State Letters, 6(9), C117, 2003 |