검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films Pham HTM, Akkaya T, de Boer CR, Sarro PM Materials Science Forum, 433-4, 451, 2002 |
| 2 |
Bulk micromachining of polycrystalline SiC using Si molds fabricated by deep reactive ion etching Rajan N, Zorman CA, Mehregany M Materials Science Forum, 338-3, 1145, 2000 |