화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 The influence of Si coverage in a chip on layer profile of selectively grown Si(1-x)Ge(x) layers using RPCVD technique
Kolahdouz M, Ghandi R, Hallstedt J, Osling M, Wise R, Wejtmans H, Radamson HH
Thin Solid Films, 517(1), 257, 2008
2 Effect of strain, substrate surface and growth rate on B-doping in selectively grown SiGe layers
Ghandi R, Kolahdouz M, Hallstedt J, Wise R, Wejtmans H, Radamson HH
Thin Solid Films, 517(1), 334, 2008