검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Influence of chemical polymer composition on integrated waveguide formation induced by excimer laser surface irradiation Hessler S, Rosenberger M, Belle S, Schmauss B, Hellmann R Applied Surface Science, 356, 532, 2015 |
| 2 |
Optimized Deep UV Curing Process for Metal-Free Dry-Etching of Critical Integrated Optical Devices Sengo G, Wolferen HAGM, Driessen A Journal of the Electrochemical Society, 158(10), H1084, 2011 |
| 3 |
Ion beam sputtering of Ta2O5 films on thermoplast substrates as waveguides for biosensors Kulisch W, Gilliland D, Ceccone G, Sirghi L, Rauscher H, Gibson PN, Zurn M, Bretagnol F, Rossi F Journal of Vacuum Science & Technology B, 27(3), 1180, 2009 |
| 4 |
Robust, efficient grating couplers for planar optical waveguides using no-photoacid generator SU-8 electron beam lithography Bross AL, Lafyatis G, Ayachitula R, Morss A, Hardman R, Golden J Journal of Vacuum Science & Technology B, 27(6), 2602, 2009 |
| 5 |
Advanced silicon processing for active planar photonic devices Shearn M, Diest K, Sun XK, Zadok A, Atwater H, Yariv A, Scherer A Journal of Vacuum Science & Technology B, 27(6), 3180, 2009 |