| 학회 | 한국재료학회 |
| 학술대회 | 2008년 봄 (05/22 ~ 05/23, 상록리조트) |
| 권호 | 14권 1호 |
| 발표분야 | 전자재료 |
| 제목 | Plasma enhanced atomic layer deposition of aluminium oxide passivation layers |
| 초록 | The water vapor transmission rates of most polymers and organic materials without the passivation layers are generally not sufficient for applications such as OLEDs. The passivation layer of devices or substrates for organic light-emitting diodes (OLED) or flexible display panels has been intensively studied because they are easily degraded by water vapor, gaseous oxygen. Also it is necessary to deposit the passivation layer at low temperature, because of low glass transition temperature of polymers. The plasma enhanced atomic layer deposition (PEALD) technique using O2 plasma is used to deposit aluminium oxide film successfully even at very low temperature, and it has a good passivation properties. In this work, we explore the deposition of Al2O3 at low temperature by PEALD using Electron Cyclotron Resonance (ECR) plasma that provides smooth, conformal, and pinhole-free films with a great potential as passivation layer for organic based devices. Ultra-thin aluminium oxide was deposited on a polyethersulfon (PES), poly N-vinylcarbazole (PVK) and Si (001) substrates by ECR-PEALD using O2 gas as a reactant at a deposition temperature of 50 degree C. This temperature is compatible with most thermally fragile plastic substrate. In order to investigate structural behaviors, chemical composition, density, and morphology of deposited films, we used X-ray Photoelectron Spectroscopy (XPS), X-ray Reflectometry (XRR), Atomic Force Microscopy (AFM), Scanning Electron Microscope (SEM), Transmission Electron Microscope (TEM). Also we used permatran 3/33 SG (MOCON instrument) to measure WVTR values, and investigated the passivation performance of the aluminium oxide film deposited on OLED by measuring lifetime of device. |
| 저자 | 김태섭, 고명균, 김웅선, 문대용, 강병우, 박종완 |
| 소속 | 한양대 |
| 키워드 | Aluminium oxide; Plasma enhanced atomic layer deposition; Water vapor transmission rate; Organic Light-Emitting Diode |
