검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors Cha CL, Chor EF, Jia YM, Bourdillon AJ, Gong H, Pan JS, Zhang AQ, Tang SK, Boothroyd CB Journal of Materials Science Letters, 18(17), 1427, 1999 |
| 2 |
Transmission electron microscopy observation of CMOS devices of titanium self-aligned silicide technology with nitrogen (NS) implantation process Jia YM, Lim CW, Bourdillon AJ, Boothroyd C Journal of Materials Science Letters, 18(5), 385, 1999 |
| 3 |
A study on the effect of incorporating nitrogen ions on titanium disilicide thin film formation for ULSI applications Lim CW, Bourdillon AJ, Gong H, Lahiri SK, Pey KL, Lee KH Journal of Materials Science Letters, 18(9), 743, 1999 |
| 4 |
Improvement an lithography pattern profile by plasma treatment Soo CP, Bourdillon AJ, Valiyaveettil S, Huan A, Wee A, Fan MH, Ang TC, Chan LH Journal of Vacuum Science & Technology A, 17(4), 1526, 1999 |
| 5 |
Study of acid diffusion in a positive tone chemically amplified resist using an on-wafer imaging technique Lu B, Taylor JW, Cerrina F, See CP, Bourdillon AJ Journal of Vacuum Science & Technology B, 17(6), 3345, 1999 |
| 6 |
Hot Isostatically Pressed Bi2Sr2Ca2Cu3O10 Coils Made with Novel Precursors Bourdillon AJ, Tan NX, Ong CL Journal of Materials Science Letters, 15(5), 439, 1996 |