화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Effect of Al incorporation on the crystallization kinetics of amorphous FeSi2 into poly beta-FeSi2 film on SiO2/Si(100) substrate
Tan D, Chua CT, Dalapati GK, Chi DZ
Thin Solid Films, 520(6), 2336, 2012
2 Surface Passivation of GaAs Substrates with SiO2 Deposited Using ALD
Dalapati GK, Chia CK, Mahata C, Das T, Maiti CK, Kumar MK, Gao H, Chiam SY, Tan CC, Chua CT, Cheng YB, Chi DZ
Electrochemical and Solid State Letters, 14(10), G52, 2011
3 Thermal curing of hydrogen silsesquioxane
Siew YK, Sarkar G, Hu X, Hui J, See A, Chua CT
Journal of the Electrochemical Society, 147(1), 335, 2000
4 Lower temperature and shorter curing time of methylsilsesquioxane for intermetal dielectric application
Chua CT, Sarkar G, Chooi SYM, Chan L
Journal of Materials Science Letters, 18(1), 33, 1999
5 Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application
Chua CT, Sarkar G, Chooi SYM, Chan L
Journal of Materials Science Letters, 18(17), 1437, 1999
6 In situ characterization of methylsilsesquioxane curing
Chua CT, Sarkar G, Hu X
Journal of the Electrochemical Society, 145(11), 4007, 1998