검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Chemical-Vapor-Deposition of Copper from Cu-I Hexafluoroacetylacetonate Trimethylvinylsilane for Ultralarge Scale Integration Applications Braeckelmann G, Manger D, Burke A, Peterson GG, Kaloyeros AE, Reidsema C, Omstead TR, Loan JF, Sullivan JJ Journal of Vacuum Science & Technology B, 14(3), 1828, 1996 |
| 2 |
Enhanced Chemical-Vapor-Deposition of Copper from (Hfac)Cu(Tmvs) Using Liquid Coinjection of Tmvs Petersen GA, Parmeter JE, Apblett CA, Gonzales MF, Smith PM, Omstead TR, Norman JA Journal of the Electrochemical Society, 142(3), 939, 1995 |
| 3 |
Characterization of Thin Copper-Films Grown via Chemical-Vapor-Deposition Using Liquid Coinjection of Trimethylvinylsilane and (Hexafluoroacetylacetonate) Cu (Trimethylvinylsilane) Parmeter JE, Petersen GA, Smith PM, Apblett CA, Reid JS, Norman JA, Hochberg AK, Roberts DA, Omstead TR Journal of Vacuum Science & Technology B, 13(1), 130, 1995 |
| 4 |
Chemical Additives for Improved Copper Chemical-Vapor-Deposition Processing Norman JA, Roberts DA, Hochberg AK, Smith P, Petersen GA, Parmeter JE, Apblett CA, Omstead TR Thin Solid Films, 262(1-2), 46, 1995 |