화학공학소재연구정보센터
검색결과 : 13건
No. Article
1 Mechanism for the Amorphisation of Diamond
Fairchild BA, Rubanov S, Lau DWM, Robinson M, Suarez-Martinez I, Marks N, Greentree AD, McCulloch D, Prawer S
Advanced Materials, 24(15), 2024, 2012
2 SiO2 etch rate modification by ion implantation
Bellandi E, Soncini V
Thin Solid Films, 524, 75, 2012
3 Damage buildup in semiconductors bombarded by low-energy ions
Titov AI, Belyakov VS, Azarov AY
Thin Solid Films, 515(1), 118, 2006
4 Trench formation on ion implanted SiC surface after thermal oxidation
Bahng W, Song GH, Kim NK, Kim SC, Kim HW, Seo KS, Kim ED
Materials Science Forum, 483, 777, 2005
5 Nanocalorimeter fabrication procedure and data analysis for investigations on implantation damage annealing
Karmouch R, Mercure JF, Schiettekatte F
Thermochimica Acta, 432(2), 186, 2005
6 Visible light laser irradiation: A tool for implantation damage reduction
Camassel J, Peyre H, Brink DJ, Zielinski M, Blanque S, Mestres N, Godignon P
Materials Science Forum, 457-460, 941, 2004
7 Quantitative evaluation of implantation damage and damage recovery after room temperature ion-implantation of N+ and P+ ions in 6H-SiC
Blanque S, Perez R, Zielinski M, Pernot J, Mestres N, Pascual J, Godignon P, Camassell J
Materials Science Forum, 433-4, 653, 2002
8 Optical characterization of SiC materials: Bulk and implanted layers
Camassel J, Vicente P, Falkovski LA
Materials Science Forum, 353-356, 335, 2001
9 Infrared investigation of implantation damage and implantation damage annealing in 4H-SiC
Pernot J, Bluet JM, Camassel J, Di Cioccio L
Materials Science Forum, 353-356, 385, 2001
10 EPR study of proton implantation induced intrinsic defects in 6H-and 4H-SiC
von Bardeleben HJ, Cantin JL
Materials Science Forum, 353-356, 513, 2001