임상우 공저 논문
| No. | Article |
|---|---|
| 1 |
Understanding of Si3N4-H3PO4 reaction chemistry for the control of Si3N4 dissolution kinetics Park TG, Son CJ, Kim TH, Lim SW Journal of Industrial and Engineering Chemistry, 102, 146, 2021 |
| 2 |
Phosphoric acid-peroxide mixture surface preparation for the improvement of InGaAs channel characteristics Na JH, Lim SW Journal of Industrial and Engineering Chemistry, 102, 35, 2021 |
| 3 |
Multiple internal reflection Fourier transform-infrared spectroscopy study on Si surface for measurement of PSL particles Yang J, Im K, Lee J, Lim S Journal of Industrial and Engineering Chemistry, 15(5), 763, 2009 |
| 4 |
Improvement of photoresist removal efficiency in ozonated water cleaning system Lee J, Park K, Lim S Journal of Industrial and Engineering Chemistry, 14(1), 100, 2008 |
| 5 |
Effect of wafer resistivity and HF concentration on the formation of vertically aligned porous silicon Lee Y, Lee J, Shul Y, Lim S Journal of Industrial and Engineering Chemistry, 14(1), 105, 2008 |